Quantitative AES and XPS: Tests of Theory Using AES and XPS Databases with REELS Background Subtraction

نویسندگان

چکیده

For quantitative analysis by AES and XPS, it is important to test the theory use correct sensitivity factors. We develop our previous analyses of peak area intensities for elemental spectra in digital Auger X-ray photoelectron databases measured using a fully calibrated spectrometer. The intensities, instead being analysed after removal Tougaard background are now extrinsic characteristic loss deconvolving angle-averaged reflected electron energy spectrum (REELS). show clear intrinsic shake-up reduced around 30% total intensities. A comparison experiment within new matrix-less quantification formulation, average matrix factors, leads correlations with rms scatters 8% 11% respectively, very wide range transitions. This gives formulae values appropriate spectrometers give true spectra.

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ژورنال

عنوان ژورنال: Journal of Surface Analysis

سال: 2022

ISSN: ['1347-8400', '1341-1756']

DOI: https://doi.org/10.1384/jsa.28.s9